1991 Starting from the core

Su Yuanshan suddenly felt that his mouth was a little dry. After a long silence, he pursed his lips and said softly.

“I have to admit that I have indeed paid less attention to the field of lithography machines during this period.”

Qu Hui had put down the book at this time, looked at him, and said seriously: "You are more than a little short, the lithography machine cannot be given up."

"Yes." Su Yuanshan nodded, and after being silent for a few seconds again, he looked at Zheng Zhenchuan: "Uncle Zheng, even if Deyuan purchases next year's Krf lithography machine, will it make you competitive?"

"Or is it really that your Hongchi has reached a point where you have to rely on Deyuan procurement to survive?"

"No... of course not." Zheng Zhenchuan immediately shook his head: "If Deyuan can purchase our photolithography machine, a group of people in China will definitely shut up, not to mention... we also have dual workpiece stations."

Su Yuanshan nodded slightly.

He recognized this reason.

In terms of scale, Deyuan is certainly not comparable to established semiconductor companies such as Intel, Texas Instruments, and NEC, or even UMC on the island.

But from the perspective of process technology and technical strength, Deyuan's rise does bear a strong imprint of Deyuan. In less than four years, it has caught up with the first echelon in the process field, which can be called a miracle in the semiconductor industry.

Judging from the financial report released by Deyuan last quarter, Deyuan has also entered the top ten wafer fabs. Even because it did not get involved in the DRAM field that is currently under impact, it surpassed NEC and Texas Instruments in one fell swoop and entered the top six.

If it can get "approval" from Deyuan, it will obviously have positive publicity for Macron's lithography machines.

In silence, Su Yuanshan suddenly looked at Qu Hui.

"Sister Qu Hui, how high can your positioning accuracy be in one year? Do you have a plan?"

——The accuracy of the workpiece table and the process technology of the photolithography machine are two different things. Generally speaking, the 0.5-micron process, when paired with a correction system, requires an overlay accuracy of less than 0.1 micron.

Overlaying means that after all the fields of the silicon wafer are exposed in sequence, the masks are replaced for repeated exposure. The masks in the two exposure processes need to be accurately stacked together, so it is called overlaying. .

As we all know, the workpiece table is the platform for all processes when the photolithography machine is working, so the overlay accuracy is directly affected by the positioning accuracy of the workpiece table.

After the error is introduced, the accuracy of the dual workpiece stage must be improved at least 10 times to an accuracy of more than 0.05 microns before it can be truly used in the 0.25 micron process technology - this is the lithography machine that remote cores need.

The positioning accuracy of later workpiece stages can even reach less than 2 nanometers! Coupled with multiple exposures, theoretically even a 2-nanometer process can be achieved.

Now Qu Hui said that the positioning accuracy is 0.5 microns, which means that Capital Jingke can only create a double workpiece stage. To be truly used in lithography machines, continuous debugging is required.

Su Yuanshan doesn't know much about machinery. He only knows that if the error of the parts is within the allowable range, then the accuracy can only be improved by relying on the correction system.

The correction system, as the name suggests, is a system for correcting deviations. Its working principle is simple and simple. It is to use a grating sensor to control and adjust the accuracy within an acceptable range. But it is complicated because it has very high requirements on the motion control module.

Qu Hui closed the book and replied: "Of course there is a plan. We will continue to optimize the correction system and motion control module, but there is no way to tell you the exact progress now."

Su Yuanshan nodded slowly and suddenly asked: "What is Capital Hi-Tech's export plan for dual workpiece tables?"

Zheng Zhenchuan and Qu Hui looked at each other, and they were silent at the same time.

After a moment, Zheng Zhenchuan said softly: "Xiaoshan, we have been strangled by foreign countries enough. I don't think our dual workpiece table needs to be exported."

Qu Hui also nodded: "I think so too."

…

Su Yuanshan let out a long sigh.

Only now did he finally understand the true purpose of these two people.

Qu Hui's thinking was probably that she was thinking more from the perspective of having been strangled so hard before, and now it was finally her turn to take the lead, so she wanted to "feel good".

Zheng Zhenchuan, on the other hand, considers that the efficiency improvement brought by the dual workpiece stage will definitely give Macron lithography machines strong competitiveness. To put it bluntly, Zheng Zhenchuan is betting the future of domestic lithography machines on duplex workpieces. On stage.

But obviously... Capital Jingke has different ideas.

After all, this is a product, not a technology.

Yes, there is a possibility that the product will be copied, but don’t forget that there is something called an anti-tampering and self-destruction device—this was invented in the West.

Once exported, it means that Capital Jingke will embrace a larger market, have a higher platform, and may even use dual workpiece platforms in exchange for the lifting of blockades in certain areas.

As everyone knows, Yuanxin has unparalleled foresight and influence in the semiconductor field.

If Yuanxin can express its attitude, then the dust may be settled whether the dual workpiece tables are classified as equipment that is prohibited from being exported alone, or whether they can be supplied to all photolithography companies in the world.

——This is the reason why the two of them came to Su Yuanshan when they had just completed the "assembly" at the double workpiece table and were still in the confidentiality period.

…

Su Yuanshan certainly knows the importance of double workpiece tables.

And he also knew that four years later, ASML would use the dual workpiece stage technology. A few years later, they relied on magnetic suspension dual workpiece stages and immersion technology to dominate the market, completely knocking Nikon and Canon into the dust.

Even the boss of Nikon said this in later generations - "You may be able to handle the light source, but the workpiece table is too difficult for you."

Of course, it turned out that he was completely wrong.

Seeing that Su Yuanshan remained silent, Qu Hui finally couldn't help it anymore: "Xiaoshan, please show your attitude."

"How do I express my position?" Su Yuanshan raised his head, his eyes filled with confusion: "Reason tells me that if Capital Jingke can improve the accuracy of the double workpiece table to the point where it can adapt to the most advanced manufacturing process within one year, then what you have mastered It will be one of the three core systems of the most powerful lithography machine in the world."

"If you are willing to export, you will defeat all unknown enemies in the field of lithography machines, where you only seize the day. No matter how awesome the WA agreement is, it will have to open an extra hole for you. The most cutting-edge ultra-high precision processing The factory will open the door to processing for you at any time."

"But in this way, Uncle Zheng and his lithography machines will lose their international competitiveness for a long time. The worst result may even be that they become completely low-end."

Zheng Zhenchuan opened his mouth, but after a while he still just sighed.

Su Yuanshan looked at the two people, recalling the crazy sanctions of later generations, and an indescribable emotion flashed in his eyes: "You all know that Yuanxin's current achievements in various fields are similar to a few new skyscrapers in an ancient city. , it looks really exciting.”

"But what about the West? Three hundred years of scientific and technological development, the birth of three industrial revolutions... It is really not something we can catch up with in just a few years or decades."

"Looking around, there are so many pyramids in the west!"

"So, what if one day, when the lighthouse country realizes that they cannot accept our rise from the bottom of their hearts, they start to block us frantically, announcing that we are prohibited from using any technology of the lighthouse country, and prohibiting any Western companies from engaging in technical cooperation with us --what should we do?"

Su Yuanshan's "alarmism" shocked both of them!

"How is it possible?" Although Qu Hui has a unique attitude towards the dual workware platform, she still believes that Su Yuanshankou's so-called "total blockade" and prohibition of "any technical" exchanges and cooperation are impossible. occurring.

Zheng Zhenchuan thinks so too.

The reason is simple. Even though the WA protocol was reworked last year, it seems to involve many aspects and technologies. But after all, it is not the previous eight-cylinder. In the civilian field, there are still holes. As long as you think of some way, unless it is particularly high-end equipment, such as an industrial machine such as a five-axis CNC machine tool, you can basically get it.

Coupled with the end of the Cold War, the rise of the Internet, new concepts such as the global village and globalization are emerging one after another...

Everyone believes that the world will never go back to the way it was before.

After all, history never goes backwards.

Seeing the disbelief on their faces, Su Yuanshan smiled inexplicably.

"Do you think I still have a Cold War mentality?"

Qu Hui nodded: "I confess, it's a bit."

"Sister Qu Hui, don't forget, the Cold War never cared about our affairs! Now that the Northern Empire has collapsed, there is only one super empire left that has experienced the Cold War..."

"Logically, it's not me who still has the Cold War mentality, but the other side."

Su Yuanshan looked to the west and continued after a moment of silence: "But I admit that the process of globalization is irreversible, especially the semiconductor industry."

"If each country's core technology in the semiconductor field is a bargaining chip on the poker table...then at the beginning, we had no chips at all, and we were not even qualified to play on the table."

Qu Hui frowned and suddenly asked: "EDA is not considered a bargaining chip?"

"EDA counts, but that's just the admission qualification." Su Yuanshan looked at Qu Hui: "Sister Qu Hui, you have forgotten what I told you when EDA split up."

Qu Hui was immediately stunned.

She remembered what Su Yuanshan said to her, Jiang Wanchao, and Zhu Jianting in the corridor.

——EDA is a world-class company rooted in China that all semiconductor companies cannot live without.

"But relying on EDA alone is obviously not enough."

"Sister Qu Hui, Uncle Zheng, I have to admit that we need to actively join and embrace globalization. But at the same time, we must also remain vigilant about being completely isolated - how to prevent being completely isolated? Obviously, the world cannot do without us .”

"If the dual workpiece table is not exported, there will only be one result, which is to force other companies to catch up. Unless others cannot realize our technology and products, otherwise... turning it into a bargaining chip, I think is the best solution in the future. .”

Su Yuanshan stared at Zheng Zhenchuan and said softly: "Uncle Zheng, we are not qualified to block others yet."

Zheng Zhenchuan opened his mouth again.

This time, he said in a deep voice: "Since you also said that we must remain vigilant about being completely isolated, then we can't give up our independent lithography machines - I don't believe that you supported the domestic production of our lithography machines, just To be able to buy something better from Nikon.”

"Yes, Uncle Zheng. Of course I am willing to see the rise of domestic lithography machines, killing everyone, and looking around. But domestic lithography machines...must rise in a competitive way. Rather than being ordered by a piece of paper from above. Forced buying to rise – then, what about the competitiveness of other companies?”

Zheng Zhenchuan fell silent and sighed softly.

"Uncle Zheng, don't worry."

Seeing Zheng Zhenchuan's waning mood, Su Yuanshan knew not to hit this old man who had devoted all his enthusiasm to domestic lithography machines too much. He smiled slightly and said: "We will discuss with Capital Jingke, and also with the Ministry of Foreign Trade and the National Development and Reform Commission. Let’s discuss it and see if we can get the best of both worlds.”

"any solution?"

"This is a reminder to Sister Qu Hui - if possible, I hope that within the next six months to one year, the dual workpiece stage can be used in lithography machines, and then give domestic lithography machines about a year. It takes time to establish advantages and get orders - as long as it can meet the 0.18 micron process, Deyuan will purchase it, and even those companies that specialize in DRAM will rush to purchase it!"

"Then the export of dual workpiece stages - when the dual workpiece stage project of foreign lithography machine companies was first launched, we became the party that in turn destroyed their technology and industry. As long as we keep advancing the technology, Then it will become irreplaceable.”

"As long as the workpiece table achieves leap-forward progress, wouldn't it be good to ban exports and only use it on domestic photolithography machines?"

Su Yuanshan finished speaking in one breath and looked at Zheng Zhenchuan.

After thinking about it, I felt that I could give Zheng Zhenchuan some encouragement.

"Uncle Zheng, as for the light source... believe me, we will be able to get the Arf light source soon. And we also have a plan to break through 193nm."

Hearing this, Zheng Zhenchuan was suddenly shocked!

He is engaged in lithography machines, and of course he knows that 193nm has become a collective headache for the industry - you know, the technology of the light source has always been ahead of the technology of the lithography machine itself. The theory of light sources was established years and decades before the light sources were created.

But when we finally realized the 193nm Arf light source and started researching the next generation light source, we realized that it was not as difficult as usual.

——They have forced the lighthouse countries to form an EUV alliance, skip 152 directly, and take the extreme ultraviolet route. Do you think it is difficult?

Su Yuanshan now tells him that there is a plan to break through 193nm!

Wouldn't that be...

"Are you telling the truth?" Zheng Zhenchuan stared at Su Yuanshan: "Don't lie to me. I know a lot of people who work on light sources - I will ask Lao Zhao later."

Su Yuanshan didn't know whether to laugh or cry: "It's useless to ask him, it's confidential."

"..."

"Uncle Zheng, don't worry. If the dual workpiece stage is only used on domestic lithography machines, it will just be the icing on the cake. When we truly surpass 193nm, that's when domestic lithography machines will have core competitiveness."

Zheng Zhenchuan looked at Su Yuanshan doubtfully, and finally nodded.

Then, he and Su Yuanshan looked at Qu Hui.

Feeling the gazes of the two people, Qu Hui suddenly felt that the gaze of these two people weighed more than a thousand pounds.

"You mean, all the pressure falls on Capital Jingke?"

"No, it's not pressure." Su Yuanshan smiled slightly.

"It's hope."