1991 Starting from the core

Thousands of eyes were once again directed at Yamayama Ichiro.

But he didn't care.

A genius design solution? Can the wavelength of Arf193nm be changed to 134nm?

Is this a joke?

On the stage, Su Yuanshan was also looking at Ichiro Yamama. He knew that this man had been grinding glass since entering Nikon and was very familiar with the light source system. Anyway, in the field of optics, Su Yuanshan was at the level of a primary school student in front of him.

But Su Yuanshan didn't care, and he could understand why Yamayama Ichiro would lose his composure on such an occasion.

Not to mention that I suddenly heard about the technology that Yuanxin had kept secret for three or four years. Even in history, when Lin Benjian came to the door with detailed arguments, Nikon and Canon did not even look at him, and thought that this guy was just a Crazy man, let TSMC take care of it and find some medicine for him.

That is to say, ASML was small and weak at the time. Although it was dragged into the EUV alliance by Intel and took over the pie, it still lost to the Japanese people in the market and had to overtake in corners to win... so it finally chose Trust Lin Benjian.

But Su Yuanshan did not answer Yamayama Ichiro.

Because he saw that Li Mingliu, who was only one step away from Yamayama Ichiro, had already looked over.

"Immersion." Li Mingliu leaned forward a little, exposing himself to Yamayama Ichiro's sight, and gave an English word.

"What?" Hearing the voice, Yamayama Ichiro instantly turned his head and looked at Li Mingliu.

"Immersion, immersion lithography." Among the many technical leaders of Yuanxin, Li Mingliu has always been known for his seriousness. He has been in charge of Yuanxin's second largest R\u0026D base for many years and now has a bit of so-called "majesty" in everything. That’s all I like, I don’t want to say too much.

After two sentences of cherishing words like gold, Li Mingliu resumed his sitting posture.

On the stage, Su Yuanshan just smiled: "I brought the news. If you believe it or not... well, actually I believe it."

After speaking, Su Yuanshan left the podium, bowed slightly to the audience, and then exited.

Until then, it was like throwing a piece of red-hot iron into a basin of ice water, and the entire venue boiled instantly.

——Unlike the people of Ni country, the domestic semiconductor industry has a superstitious trust in Su Yuanshan. After a brief period of ignorance, it immediately fell into excitement and excitement, and the venue turned into a vegetable market in an instant.

Li Mingliu's voice was not loud, and the participants at the back could not hear him clearly, but it did not prevent them from patting the shoulders of the front row one by one and asking questions along the way.

Amidst the noise, Yamayama sat down again.

His mind slowly regained consciousness.

He couldn't accept it rationally, but his reason told him that this... was very likely to be true.

Because Su Yuanshan, there is no need to lie to people at this time and on this occasion.

——Because once the news is proven to be false, not only Su Yuanshan's personal reputation, but also the reputation of Acer, and even the reputation of the entire mainland semiconductor industry will be destroyed.

Immersion lithography?

Put it in the water?

Go crazy!

At this time, Su Yuanshan's voice slowly came through several seats.

"By adding water with a refractive index close to the glass between the lens and the substrate, the refraction angle of the light emitted by the objective lens is reduced, thereby increasing the aperture of the objective lens and improving the resolution. According to CD=K1*λ/NA, after replacing air with water , which is equivalent to the wavelength of 193 nm being equivalently shortened to 134 nm.”

"And ... it doesn't require reinventing the photoresist."

Su Yuanshan looked at the people gathered in a circle around him, and the corners of his mouth curled up slightly.

“For specific technologies and news, please pay attention to Macron’s relevant press conferences.”

…

Five hours later, the news that Acer used immersion lithography technology to conquer the 193nm light source instantly spread throughout the semiconductor industry.

Compared with the speed of dissemination of industry news, news has always been a step later, but it was also on the second night that the news officially announced that the world's most advanced lithography machine was born in China and successfully passed the acceptance by the expert group.

For a time, the door of Macron was broken by countless media. While conducting interviews, these media also took on the responsibility of popularizing science and popularized to the public through various channels what a lithography machine is and what a wafer fab is. Where did the central processing unit come from...

As for Su Yuanshan, he declined all interview invitations and set off for Silicon Valley the day after the Semiconductor Summit.

Let the glory of immersion lithography be left to those who deserve the glory.

*

*

Silicon Valley, mountain villa.

Carly walked into the door in a hurry. She didn't mind at all that Su Yuanshan was yawning and even wearing slippers. Then he sat down opposite him, stared into Su Yuanshan's bloodshot eyes and asked: "BOSS, is this true?"

Su Yuanshan suppressed a yawn and smiled: "Even if you don't believe our media, you still have to believe me... We will be able to produce the 65nm process technology soon. Can we still fake it by then?"

"..." Carly was speechless for a while.

Of course she was willing to believe Su Yuanshan, but when she asked Su Yuanshan, it wasn't a question of disbelief, but...she thought it was too incredible.

"How did you do it? Is Lin Benjian's team the main team?"

"Yes, but how... I really don't know. They spent three years developing it and conquered hundreds of technology nodes. Well... they also spent a lot of money."

"What about mass production?" Carly immediately asked the key.

"The mass production model will probably be launched next year." Su Yuanshan knew what Carly wanted to ask. He smiled slightly and said: "Carly, I don't know how much you know about the technology of the wafer factory... but I can tell you, According to current speculation, the limit of immersion lithography technology can even reach 7nm line width. If EUV cannot be overcome, then for a long time to come, how to rely on technology to reduce the process will be the main task of the wafer factory. .”

"Can it reach 7nm?"

"Yeah, just multiple exposures."

After a pause, Su Yuanshan said seriously: "Carly, you must have a clear understanding. When it comes to advancing the process, no one is more powerful and courageous than Deyuan."

Carly pursed her lips, she really wanted to refute... but in the end she found that she couldn't refute anything.

Because it's true.

She was personally involved in the sale of wafer fab equipment between AT\u0026T and Huajing - and at that time, Deyuan was just a construction site!

But how many years is it now? Deyuan has been chasing all the way from 0.5 micron to 0.35, 0.25, 0.13... Its speed is so fast that it can be called a miracle.

After a few seconds of silence, Su Yuanshan finally couldn't bear it anymore. He covered his mouth and yawned.

"Carly, please help me make an appointment with Mr. Sanders."

Carly came back to her senses, nodded after thinking for a moment, and then asked: "After three visits to the thatched cottage, is this your last visit?"

"Haha, yes. By the way, it's best to make an appointment after the press conference. I need to take a good rest these two days."

"Speaking of which, it's really time for Mr. Sanders to retire."

Su Yuanshan stretched and smiled.