Military Industry of Great Powers: Build the Strongest Flanker

Different media have different effects on the transmission of light.

For example, water has a good transmission effect for 193-nanometer ultraviolet rays, but it is a nightmare for 65-nanometer lasers with a shorter wavelength. The refractive index is too high, which is basically equivalent to an opaque liquid.

The topic of the Optics Laboratory not only studies the effects of light of different wavelengths penetrating different media, but also studies how to polish different crystals into lenses.

It is divided into extremely hard materials such as quartz and glass, or relatively soft materials such as resin.

"We use machine tools for rough grinding first, then manual grinding for fine grinding to remove obvious flaws, and then machine fine grinding..."

Zhao Guoqing shook his head. This kind of accuracy is enough for a camera, but it is far from enough for a lithography machine. The accuracy of a lithography machine is calculated in nanometers. A deviation of a few nanometers will cause errors after light refraction. Bringing about a plummeting yield rate.

He was about to enlarge his move and point directly in two directions.

Zhao Guoqing said: "After fine grinding, the optical detector is used, and the test results of the lens surface are input into the computer, and the computer calculates the fine grinding plan..."

"..."

"Director Zhao, the key is what kind of polishing solution to use. The precision reaches nanometer level. No matter how you control it, you can't control such a fine thickness very accurately."

Whether it is done manually or by machine, at this point, even a speck of dust on the lens may cause an irreparable scratch on the lens if wiped by hand.

Zhao Guoqing nodded. Machine tool rough grinding can control the accuracy to 100 microns, manual fine grinding can control the accuracy to 10 microns, and machine fine grinding can only control the accuracy to 1 micron, which is the threshold of 1000 nanometers.

Going any further is no longer as accurate as the current methods can achieve.

To guide and inspire them, this process was too slow, so Teacher Xiao Zhao reported the answers directly.

"Magnetic Fluid Polishing!"

Li Mingxi from the Optical Research Laboratory asked: "Magnetic fluid polishing, Director Zhao, what is magnetic fluid polishing?"

Teacher Xiao Zhao drew a picture of mixing steel powder with a diameter of about a hundred nanometers into a non-Newtonian fluid.

"Cover the magnetic fluid on the lens, and use the magnetic field to control the magnetic fluid to polish the lens!"

There is only a layer of paper between science, and if it is broken, there will be no secrets. When Zhao Guoqing said this, Li Mingxi and the others knew exactly what was going on.

Just like when you build an airport, computer mapping is equivalent to drawing the terrain and correcting it to how much digging needs to be done at each point.

The magnetic fluid can be controlled by the magnetic field under the precise control of the computer, which piece needs to be dug out and how much stuff needs to be dug out.

"What is the ratio of steel powder? How much magnetic field is applied and how much can be removed per second?"

Much more needs to be done.

For example, if a certain magnetic field wears away 100 nanometers in one minute, what about one second? This also means precise control.

There is a more sophisticated method two.

"You should know that the injection of ion beam can transform the chemical properties of substances. By precisely controlling the intensity and injection time of the ion beam, the degree of substance transformation in the lens can also be precisely controlled."

Chai Qingjin of the second group said: "When the time comes, chemical reagents will be used to clean off the deteriorated layer, and the accuracy of polishing can also be controlled more accurately..."

Zhao Guoqing nodded and said: "Look, the methods are all thought up by people. The testing instruments given to you now are all top-notch high-precision optical instruments. I don't need to emphasize how to do it. By the way, you can do it too." If you don't use these two methods, whoever comes up with a more feasible solution, I will personally reward him one million yuan..."

"Huh...one million..."

There are really many people who are eager to try it.

Zhao Guoqing is also happy to spend this money.

In fact, Zhao Guoqing did not regard the lens as a technical difficulty. First of all, the material of the lens, the purification of quartz crystal in our country is top-notch, and then polishing, knowing the principle is just one thing.

It’s just that the cost of production is higher.

Walking past the optical laboratory, next door is the laser laboratory.

"Director Zhao!"

"General Manager Shi, I heard that you got married, but I haven't had time to congratulate you yet!"

Shi Wenxiu, the former anti-hero of the 101 Laser Research Laboratory, was a very strong girl.

The research directions of the laser laboratory include krypton fluoride lasers, argon fluoride lasers, carbon dioxide lasers, and semiconductor lasers, many of which have been used in the military...

"Director Zhao, our krypton fluoride laser can already produce 30 kilowatts!"

Zhao Guoqing nodded. This power can already be used in lithography machines. Xiao Shi, keep working hard to conquer argon fluoride lasers. 193 nanometer lasers are the future.

Along the way, we went to the Semiconductor Materials Research Laboratory, Carbon Fiber Research Laboratory, Metal Crystal Phase Research Laboratory, EDA Software Research Laboratory...

Zhou Li, who was following Zhao Guoqing, found a familiar feeling again. Teacher Xiao Zhao began to teach the children to do homework again.

All the way to the stable research room of the engineering platform, Teacher Xiao Zhao frowned rarely.

"Director Zhao, we have completely surveyed and mapped ASML's PA2000 lithography machine, including sampling and analysis of the materials, but..."

But the workbench stability system has not been completely solved yet!

Zhao Guoqing also reviewed the surveying and mapping data many times, and held many seminars on its operating principles.

It is similar to what Zhao Guoqing imagined. Three-level control is used. After the workbench is stabilized, three-level control is performed. The accuracy of each control increases by an order of magnitude.

It is similar to artificial thread. It is first adjusted to micron precision, then finely adjusted to hundreds of nanometers, and then finely adjusted to nanometers.

Behind it is precise current control, high-precision digital control servo motor, and precise sensor measurement.

The PA2000 workbench stabilization system uses two position control methods. One is a ball screw, which converts spiral movement into horizontal movement and accurately controls displacement from an angle.

The second is hydraulic control, which uses a device similar to a relay to control the magnetic field through current to change the pressure, and then the displacement can be fine-tuned.

"It can be seen from their control software that how much current is given is determined through repeated tests. Their sensors have high precision. They measure the displacement of the workbench, and the results are directly fed back to the computer, and then corrected through fine-tuning..."

Zhao Guoqing believes that it is still necessary to conduct repeated experiments and let experimental data speak for itself.

As for servo motors, hydraulic transmission devices, ball screws, etc., and even a belt drive, all personnel are assigned to tackle key problems.

Detailed data, discover patterns from the data, and summarize patterns.

"In two months, I will take you to a place and prepare for it. It will take about two or three months!"

Zhao Guoqing said to Zhou Li: "Remind me to arrange a seminar with the Microelectronics Research Laboratory in a few days!"

Sensors can be manufactured, and the control program is another technical point. A key test is response time. There are hundreds of sensors with various requirements for pressure, light, current, and magnetic field, and there are several control schemes.

It's okay, throw money...