Scholar's Cultivation System Panel

"All the personnel are here and can start testing at any time." Xu Yun from the Institute of Optoelectronics Technology, wearing a special research uniform, reported to Hou Shengchang, the president of the Academy of Sciences, after making arrangements.

Hou Shengchang, who was also wearing research clothes, immediately raised his hand after hearing this and said: "You are the person in charge of the project. You can proceed according to your own arrangements. I am here mainly to observe." The tone of his speech was very soft, and he did not try to dominate the proceedings at all. The meaning of command.

At first, he was interested in Xu Yun's ability and personally went to Jingzhou University to invite him to take charge of the photolithography machine project.

It has only been more than a year to this day.

But the harvest was huge.

Xu Yun led the project team of the Institute of Optoelectronics Technology and successfully manufactured the first extreme ultraviolet lithography machine in China.

Has far-reaching significance.

It can be said that the domestic semiconductor field has entered a new milestone.

When he learned that the first extreme ultraviolet lithography machine was about to undergo chip testing, he had almost no hesitation and immediately put off his subsequent schedule and took a plane from the Imperial Capital to Jincheng.

As such an important moment, he, the dean, must witness this great scene with his own eyes.

Xu Yun knew Hou Shengchang's character, so naturally he would not think too much about such trivial matters, and immediately answered with a smile on his lips.

"I understand Dean."

After speaking, he ordered the staff: "Let's get started."

At the same time, Luo Changhui, Yang Jing and others who stayed at the scene could not hide their excitement and excitement even though they were all dressed in professional clothes.

As old people who develop lithography machines, they have dreamed of seeing domestic extreme ultraviolet lithography machines countless times. Now this dream is about to become a tangible reality. If they want to maintain inner peace and silence, it is really difficult. too difficult.

Even Hou Shengchang's breathing became rapid.

However, at this time, the worry in everyone's heart became stronger.

It's not that I don't trust the results I've made for so long, it's just that anything can happen until the last minute.

It's really hard to let go completely.

This test is related to the performance of the entire lithography machine. Only by passing the test can we proceed to the next delivery link. Otherwise, we will need to re-optimize and debug to check the problem.

But if the situation becomes like this, I don’t know how long the debugging time will be consumed.

It is certainly impossible to deliver lithography machines according to the previously announced time, and by that time the semiconductor field will inevitably deteriorate further.

This is definitely a situation that no one here wants to see.

Therefore, after Xu Yun officially issued the order, everyone was fully focused and patiently waiting for the final result.

June 5, 2021, is definitely an extremely important day for the domestic semiconductor field.

It is difficult to look away from the precision instruments in the institute, which are composed of hundreds of thousands of parts. They seem to have become works of art at this moment.

At the same time, its value is unimaginable to ordinary people.

It is no exaggeration to say that the price of an extreme ultraviolet lithography machine is as high as billions of dollars.

The photolithography machine developed by Xu Yun using new core technology is much lower in cost than ASML.

This can also be regarded as the advantage of domestic extreme ultraviolet lithography machines.

If they compete with each other in the future, the other party will quickly lose its original competitiveness.

The preliminary material preparation work has already been completed, and the produced chip-level single crystal silicon rods have been cut into thin slices and turned into high-purity chip-level silicon wafers, or wafers.

To make wafers into chips, the first thing you need to prepare is a photolithography mask.

Its function is to draw the functional module circuit system and physical structure map of the chip on the printed master, so that the mass manufacturing of subsequent chips can begin.

The chip tested this time is the smart car chip jointly designed by the Artificial Intelligence Laboratory and Warwick Technology.

Laboratory director Yan Kaiming named it Lingsi.

It is a 7nm process chip.

At this time, Xu Yun, Hou Shengchang, Luo Changhui and others had arrived at the main control system of this extreme ultraviolet lithography machine.

It can be seen that the wafer is about to enter the next photolithography stage.

While this huge precision semiconductor equipment was running, Xu Yun introduced it to Hou Shengchang from the side.

"Dean."

"The chip manufactured this time is a smart car chip designed by Deepin Technology's Artificial Intelligence Laboratory and Warwick Technology."

"And we still use Yinglong EDA."

When talking about the last incident, Xu Yun deliberately emphasized his tone.

When several overseas EDA giant companies such as Xinsikaideng announced restrictions on their use of software, Hou Shengchang said that there was no need to worry because there were already companies developing domestic EDA software.

It can be seen that he is relatively familiar with Warwick's Yinglong EDA project.

However, after hearing this sentence, a little surprise inevitably flashed in his eyes.

The next second he turned his face sideways and asked, "Has the Yinglong project been completed and actually started to be used?"

This was obviously a surprise.

Of course, you can’t blame him for this. Who would have thought that Warwick’s bold attempt to use artificial intelligence models to assist software development would improve the overall development efficiency so much.

Otherwise, even if the first extreme ultraviolet lithography machine is delivered for use, Yinglong EDA is still not perfect.

There was no need to hide this matter. Xu Yun thought for a while and organized a verbal explanation.

"Yes Dean."

"The Yinglong EDA project has been completed as early as years ago."

"So fast?" Hou Shengchang exclaimed.

Xu Yun answered with a smile: "This is because they relied on the assistance of the artificial intelligence model."

"That's it." After hearing this, Hou Shengchang immediately figured out the situation.

At present, the artificial intelligence Deep Sea copied from Benben has been gradually applied to various fields, and has exerted capabilities far beyond human beings. Assisting software development is naturally nothing.

Hou Shengchang still has a certain understanding of this.

"Very good."

"In this way, our chip manufacturing industry chain can be completely solved, and there will no longer be any constraints in the future."

Then he thought of the effects of this situation, and the smile on his face suddenly became a little brighter.

Although the other people around him didn't speak, they were in a good mood judging from their expressions.

Although the test has just begun, seeing Xu Yun's calm and confident state made them all calm down a lot.

Before photolithography, the wafer generally needs to be heated at high temperature to produce an oxide film on its surface, which is used as an optical fiber to facilitate the subsequent photolithography process. This is also the so-called coating.

After the wafer completes this process, the next step is to apply photoresist.

It’s worth mentioning that this is not a high-end photoresist produced by Neon’s company.

It comes from a new photoresist that Xu Yun accidentally synthesized, and the data shown in the test far exceeds that of the other party.

Key costs are lower.

However, since there were no high-end lithography machines in China before, there has been no way to actually test it.

Today I can finally replace its true value.

As long as the performance is stable enough, mass production can be carried out to ensure the manufacturing of chips.

Hou Shengchang was the happiest about this. It was refreshing to think that the Xuyun Academy of Sciences had saved a lot of time and money in the field of photoresist.

You must know that photoresist is also an important link in chip manufacturing and must be overcome.

In the past, there were no high-end photolithography machines in China, so there was no excessive development in the field of high-end photoresist.

The research conducted is mainly based on low-end photoresists.

It cannot be used on a photolithography machine at all.

Fortunately, Xu Yun synthesized a new photoresist by chance. Otherwise, if there is no high-end photoresist in the photolithography machine, it would still be impossible to complete today's test.

Even if it is successfully delivered, it will not solve the problems in the semiconductor field.

After all, even if a lot of energy is invested in research immediately, it may not be possible to develop high-end photoresist in a short time.

"I have to thank Professor Xu for the photoresist this time, otherwise today's test would only go so far."

Perhaps Hou Shengchang was in a good mood, and he didn't forget to mention Xu Yun's eyes full of love at this time.

Once again, I feel lucky for my important decision to let Xu Yun serve as the project leader.

Speaking of which, it was Xu Yun's photoresist that aroused considerable publicity around the world, and he made up his mind to invite Xu Yun to develop the first domestic extreme ultraviolet lithography machine.

At this time, Luo Changhui beside him couldn't help but said: "Professor Xu's photoresist has indeed solved a big problem for us."

Xu Yun felt dumbfounded as he listened to the two men putting high hats on themselves.

He immediately responded: "After all, it is a new type of photoresist. Whether it can achieve a stable effect is still unknown."

His words were certainly not modest.

This new type of photoresist has not been tested on actual high-end chips since it was developed, and the current production stock is limited. In many places, the final results really need to be seen.

For example, the most important yield rate for wafer fabs.

If the chip lithography using this kind of photoresist has a high defective rate, then even if the cost of the photoresist is very low, it will never continue to be used.

This is also the reason why it is difficult for new photoresists to find an international market.

Basic fabs take absolutely no chances.

Otherwise the losses caused will directly affect profits.

Hou Shengchang obviously had great trust in Xu Yun at this moment. Hearing this, he reached out and patted Xu Yun's shoulder and comforted him: "Without you, there would be no domestic extreme ultraviolet lithography machine today. You need to give yourself more confidence." It seems that there is no trace of it. I don’t think there will be any problems with today’s test.

Then the photolithography machine passes the extreme ultraviolet light through the lens and shines it on the integrated circuit mask prepared in advance.

Expose the circuit diagram drawn by the designer on the wafer.

Later, the photoresist needs to be dissolved.

The photoresist exposed to ultraviolet light during the photolithography process is dissolved.

The pattern left after cleaning is consistent with that on the mask, and then etching is performed.

Although this step is already very tedious, subsequent steps require ion implantation, electroplating and polishing to cover the layers until a wafer full of chips is produced.

Although the waiting process was boring, Xu Yun, Hou Shengchang and others were not impatient at all.

Slicing begins after comparative testing of the wafer reference circuit pattern and each chip.

and discard defective chips.

After the remaining chips are packaged and tested again, they can be packaged and shipped.

By following the entire process, you can be sure that there are no problems with the functions and operation of the lithography machine and are within the ideal parameters during design.

Although I don’t know what will happen after long-term operation, at least it has passed the test now.

Next, you only need to determine the defect rate of the chip and the final performance of the produced chip.

If there are no problems, we can officially announce the delivery of the first domestic extreme ultraviolet lithography machine to the outside world.

I believe the explanation will definitely cause a global sensation.

"It will take some time to get the final chip test data. Dean should go to the lounge first."

Xu Yun breathed a sigh of relief and said specifically to Hou Shengchang beside him.

Everything that needs to be seen has been seen now, and the lithography machine will start working on its own, so there is no need to stay where it is and wait.

"Don't worry, Dean, there will definitely be no problem." After hearing this, Luo Changhui, who was next to him, also took up the conversation and echoed.

Although Hou Shengchang is still here at his age, facing the extreme ultraviolet lithography machine that makes people lose their mind, he would rather stop and appreciate this big guy.

But he thought it would take some time for the results to come out, and he happened to have other things to tell the project team, so he nodded and agreed without any hesitation.

"Oh well."

After Hou Shengchang let go, Xu Yun led them to the rest room not far away.

Since others still have to keep an eye on the main control system to record data, apart from Xu Yun and Hou Shengchang, there are only two other people in the lounge, Academician Luo Changhui and Researcher Yang Jing.

Domestic extreme ultraviolet lithography machines are progressing rapidly and will soon be officially delivered for use in manufacturing chips.

This made everyone feel very good, and even the atmosphere in the lounge became much more relaxed.

"This time we have to take a good look at the faces of those overseas. They would never have thought that our progress would be so fast."

"When we announce this news, I believe the whole world will be moved." Yang Jing took Luo Changhui's words and added with a smile.

Hou Shengchang next to him was also smiling: "The arrival of this day is indeed worth looking forward to."

"It's not far away."

I have never felt so happy as I do today.

Listening to everyone's conversation, Xu Yun would definitely be lying if he said he was unhappy.

But to be honest, his mind was not on that.

The successful development of domestic extreme ultraviolet lithography machines is already a certainty, and there will be basically no problems.

It can be said that it doesn't matter whether he continues to stay in Jincheng.

According to his plan, he would return to Jingzhou City immediately after the photolithography machine test was completed.

Although he often returned to Jingzhou to accompany Chen Shihe in the past few months, the total time he spent was not that much.

Chen Shihe's due date is in August, so he naturally wants to stay with Chen Shihe for the rest of the time.

He knew that nothing would happen if Chen Shihe had her parents and mother by her side, and Chen Shihe had asked him to focus on projects many times, but he knew very well that Chen Shihe definitely wanted him to be by her side.

Just as he was thinking about this, Hou Shengchang, who was sitting on the sofa in the middle, suddenly mentioned something again.

"By the way, there is something else I want to tell you."

As soon as these words came out, Luo Changhui and Yang Jing, including Xu Yun, all raised their eyes to look at Hou Shengchang at the same time.

I want to know what Hou Shengchang is talking about.

Hou Shengchang didn't show any concern about this, and spoke in a deep voice.

"Professor Tonino, the chief technology officer of ASML, wants to come to our Academy of Sciences to exchange lithography machine research and development technology. The academy has agreed to this and has set the exchange location at your institute."

"Chief Technology Officer of ASML?"

"Want to communicate and learn with us?"

Almost as soon as Hou Shengchang finished speaking, Yang Jing beside him couldn't control his emotions and shouted a few words subconsciously.

A lot of question marks emerged in my mind.

Mainly in the past, ASML was the world's top lithography machine company. Even if you wanted to buy their high-end lithography machines, it was impossible, let alone exchange and learn R\u0026D technology.

It's normal to be surprised by this.

Although Luo Changhui's expression was a little moved when he heard the news, he quickly returned to normal.

Then express your judgment.

"Asmer's move may be Ling's intention. I don't believe he will share the lithography machine development technology with us."

"You guessed it right." Hou Shengchang nodded to the two of them in approval, then turned his attention to Xu Yun and asked, "I see that you are not surprised. Tell me what you think."

What Hou Shengchang said is indeed correct.

Xu Yun did not show any surprise at the news.

Even this was completely expected.

After all, his existence is very special in the scientific community. In just a few years, he has brought changes to many fields. He even publicly stated that he would deliver the first extreme ultraviolet lithography machine this year. This approach will definitely cause a stir. Smyr's concerns.

Even if they don't believe that this thing can be successful, they will feel a little worried in their hearts.

In this case, it is normal to take the initiative to send someone over to contact you.

Unfortunately, we can only say that the other party made the wrong idea. Now that the domestic extreme ultraviolet lithography machine has been successfully developed, we are not afraid of letting the other party know.

The thought stayed here, Xu Yun immediately smiled and said: "The other party suddenly sent people to exchange and learn at this time, just to confirm whether we have successfully developed an extreme ultraviolet lithography machine."

"Since they want to know so much, let's just grant this wish."

"You're right, that's what the courtyard had in mind." Hou Shengchang was very satisfied with Xu Yun's analysis, and the smile on his face became brighter.

Next, Xu Yun and Luo Changhui learned more about the chief technology executive from Hou Shengchang.

I learned that the other party would arrive in the Imperial Capital in two days and then come to Jincheng.

Faced with this situation, Xu Yun must wait until he has received the technical executive before returning to Jingzhou City.

Anyway, the testing of the lithography machine is a long-term job, and it will be in operation to manufacture Lingsi smart car chips. Therefore, Xu Yun is looking forward to the arrival of this technical executive. He does not know that the other party will see this machine that can manufacture What kind of special mood will it be after using the extreme ultraviolet lithography machine for 7-nanometer chips?

It just happens that with the help of ASML, a giant company, we can completely open up the global position of the domestic semiconductor field.

I don't know how much time passed, but there was a sudden knock on the door that shocked the spirits of several people.

With almost no hesitation, he immediately shouted: "Come in."

Liu Xing, a postdoctoral fellow as a research assistant, pushed open the door and came in, holding an unbound document in his hand. His handsome face was filled with excitement and joy at this moment.

Seeing this, without waiting for Liu Xing to report the situation, Hou Shengchang, who had already stood up from the sofa, asked: "Is there any result from the chip test?"

"Yes Dean."

"According to test data, the chip defect rate of this batch of wafers is within the normal range."

"And there are no issues with chip performance."

After Liu Xing quickly finished speaking these important information, they finally breathed a sigh of relief when they saw Hou Shengchang, Luo Changhui, Yang Jing and others...

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