Technological power starts with upgrading lenses

After returning to Pingjiang with the photosensitive chip, Kang Chi returned to busy work. At the same time, out of priority, the camera could only be put in the back row.

Time passes day by day, and the one-month improvement deadline mentioned by He Yong is getting closer and closer.

Finally, on November 13th, He Yong called.

"The equipment has been modified and is undergoing final inspection before the experiment. It is expected that the test can start on the 15th."

"Well, I'll come over tomorrow. I've worked hard for you during this period."

The two briefly chatted for a few words before ending the call.

Kang Chi then reorganized the research and development work of Datang Heavy Industries, making sure that the project could proceed normally without him, and then set off for Changchun.

Two days later, in the clean laboratory of the Changchun Institute of Optics, the researchers of the DPP-EUV light source project team were all fully armed and sticking to their posts, conducting the last inspection before the test.

Kang Chi was also standing in the control room at this time, looking at the light source equipment inside that was about the same size as an ordinary bedroom through the glass, and he was also full of expectations.

As long as the light source is fixed, the development progress of his lithography machine can increase by at least one-third.

In addition to the lens manufacturing equipment that has been assembled in Pingjiang, as well as the workpiece table that is currently being tackled.

The time for integration and debugging of the three major parts of the EUV lithography machine is just around the corner.

After He Yong made a final check on the main parameters of the equipment and the experimental conditions, he walked to Kang Chi and said as quietly as possible: "All parameters have been verified and we can start."

"Then let's get started."

"Um!"

This experiment was mainly conducted in two stages.

In the first stage, only the equipment is powered on, and then tin gas is sprayed to test whether the magnetic field can suck the tin gas into the waste collector as expected.

After He Yong was given the order to start the experiment, staff inside and outside the laboratory immediately took action.

The device is energized and the magnetic field is pressurized...

As the data on the screen jumped wildly, the number finally settled at three thousand Gauss.

This magnetic field strength is obviously not comparable to the magnetic field strength of hundreds of thousands of Gauss for controllable nuclear fusion, but the two have different sizes and purposes, so there is actually no comparison.

For EUV light sources, it is only necessary to restrain the plasma and tin liquid debris. No matter how high the intensity is, it is just a waste of electricity.

"Prepare for the first squirt, squirt!"

As the staff pressed the button... nothing seemed to happen.

Well, this is not a rocket launch. It is impossible for people to see the jet of tin gas with the naked eye...

In the LPP solution of using laser to hit the tin liquid, in order to generate a stable and high-power light source, the laser needs to be fired 50,000 times per second and hit the tin liquid every time.

In the DPP solution, it is achieved through the energization ‘ignition’ frequency of the positive and negative poles. The technical difficulty is much simpler. At the same time, because the frequency of the photoelectric switch is less difficult to increase, the room for power improvement is very large.

The real limitation is the frequency of tin gas injection.

Limited by the physical structure, the current injection frequency is only 20,000 times per second.

Since the injection frequency could not be increased, Kangchi directly worked hard to increase the amount of injection each time and electrify it five or even ten times with each injection to maximize the conversion of tin into plasma.

Anyway, there is a magnetic field constraint, so there is no fear of gas, debris and plasma flying around in the electric shock.

Even so, a frequency of 20,000 times per second is an exaggeration.

The results of the experiment can only be observed through high-speed cameras and various analytical instruments to play back the experimental data.

Ten minutes later, the test analysis results came out.

"No leakage of tin elements was found. All the tin gas condensed into a liquid state after 0.8 seconds and entered the waste collector smoothly!"

Hearing the analyst read out the results in an excited tone, everyone's faces showed joy.

This shows that the most important magnetic field design supporting this set of design plans is feasible!

Everyone can already feel the warmth of the dawn of victory shining on their faces!

He Yong took a deep breath, suppressed his inner excitement, and said in a deep voice: "Continue to the next step and spray continuously for 10 seconds."

Then,

10 seconds, 30 seconds, 1 minute, 10 minutes, 30 minutes!

The intensity of the tests continued to increase, but without exception, they were all completed successfully!

He Yong finally couldn't restrain the joy on his face and reported to Kang Chihui excitedly: "Dr. Kang... all the first phase experiments passed successfully!"

Kang Chi nodded: "Then let's start the second stage directly."

"OK!"

Although after a morning of experiments, everyone was a little hungry, but at this juncture, no one had the idea of ​​​​having a meal and then coming back to continue testing.

Everyone is holding their breath, looking forward to the success of this machine, which has condensed their efforts for countless days and nights, on another technical route with greater potential!

"Prepare for the first ionization, start!"

As soon as he finished speaking, the data from the light collector was transmitted to the big screen.

The extreme ultraviolet light parameters jumped directly from 0W to 500W!

Although this 500W extreme ultraviolet light only lasts for 0.00002 seconds, everyone knows that one of their hands has touched the door to success!

"500W, we succeeded!"

Everyone could no longer suppress their excitement and stood up to applaud Kang Chi in celebration.

Kang Chi couldn't help but have a smile on his face: "Yes, we succeeded."

However, this is a phased verification and can only mean that this technical line is real and feasible.

Next, like the first phase of the experiment, they will continue to increase the intensity of the experiment to determine whether it can run stably and directly enter the commercial stage.

Ten minutes later, the specific analysis data came out. When the tin metal had just been ionized, the magnetic field still completed its mission.

It is like an invisible cage that tightly restrains the entire luminous area, preventing any substance from touching equipment that should not be touched.

Then Kang Chi directly asked He Yong to increase the intensity, from 10 seconds to 1 minute, and the third round was directly 30 minutes!

Stable light source for half an hour!

At this point, it has basically been proven that this DPP-EUV light source has commercial value!

When the last test of the day ended, the entire laboratory immediately boiled.

"It worked, it really worked!"

"We have a 500W EUV light source!"

"Oh my god, Dr. Kang's improvement actually went from 80W to 500W!"

Applause and cheers echoed repeatedly in the control room,

Everyone hugged each other through thick protective clothing, and tears of excitement spilled on the transparent protective masks, which added to the joyful atmosphere of the laboratory.

Seeing this scene in front of him, He Yong's body couldn't help but tremble a little.

He didn't know how many times he had done this scene in his dreams.

Until today, the dream finally came true.

Unfortunately, this success was not brought to everyone by him...

He Yong turned to look at the young man next to him with a complicated expression.

People of this age can probably only be found among assistants in their research institute, right?

"Congratulations, you won."

"Thanks."

Of course Kang Chi could also feel He Yong's disappointment in the excitement, so he comforted him: "If it weren't for the solid foundation you laid before and the ability to complete the equipment improvements so quickly, this day would definitely not have happened. Coming so soon.”

"Actually, I don't want to be the last one to pick peaches. That would be so annoying... As long as you can supply me at cost price as agreed before, and then share 30% of the profit from my technology patent, the rest will be taken care of." That’s it.”

He Yong shook his head: "Don't worry, I will fill in the experimental report truthfully. Even if such a big credit is put on my head, I can't afford it. I can be proud of myself before I die if I can share some of the hard work."

Well……

Although what he said was a bit strange, it seemed to make sense.

The power suddenly broke through from 80W to 500W. The result was really great.

Even if He Yong can only share a small amount of credit, it will still be much better than his previous breakthroughs of a few watts or dozens of watts.